Research & Development Laboratory
• Established Research & Development Laboratory in 2012
• Converted corporate Research & Development Laboratory on December in 2012
• Research and development that meets the customer's requirements
• Secure technology that reflects the market situation in the rapidly changing
• Research and development that consistents with business strategy of the company
Intellectual property status
| patent application | patent disclosure | patent registeration |
The domestic market | 19ea | - | 12ea |
Overseas market | 2ea |
| 2ea |
| Patent | status | registeration number | Country |
Repair method of Electrostatic Chuck | Registeration | 10-1****** | S.KOREA |
Electrostatic Chuck | Registeration | 10-1****** | S.KOREA |
Electrostatic Chuck | Registeration | 10-1****** | S.KOREA |
Electrostatic Chuck & Its Repair Method | Registeration | 10-1****** | S.KOREA |
Electrostatic Chuck & Its Repair Method | Registeration | 10-1****** | S.KOREA |
Electrostatic Chuck & Its Repair Method | Registeration | 10-1****** | S.KOREA |
Electrostatic Chuck & Its Repair Method | Registeration | 10-1****** | S.KOREA |
Repair method of Electrostatic Chuck | Registeration | 제10-2****** | S.KOREA |
Edge Ring of Electrostatic Chuck | Registeration | 제10-2****** | S.KOREA |
Electrostatic Chuck and Repair Method thereof | Registeration | I 6***** | TAIWAN |
Electrostatic Chuck | Registeration | 제10-2****** | S.KOREA |
Electrostatic Chuck & Its Repair Method | Registeration | 제10-2****** | S.KOREA |
Electrostatic Chuck Test Equipment | Registeration | 제10-2****** | S.KOREA |
Electrostatic Chuck & Its Repair Method | Registeration | ZL 2017 1 0****** | CHINA |
ULTRASONIC TEST SYSTEM
ROUGHNESS MEASURING INSTRUMENT
HEATING TEST SYSTEM
ESC TEST MACHINE