ESC NEW Design ▣ ESC BODY Design ▣ ESC PLATE Design ▣ ESC ELECTRODE Design ▣ ESC 3D Design ▣ ESC Heater Design
Specialized processing of material ▣ Processing of Ceramic plate&ALN&SiC ▣ Processing of Fine Particle Pattern ▣ Processing of Special Polishing ▣ Processing of Micro flatness
Test & Inspection ▣ ESC Ultrasonic inspection ▣ Thermal inspection ▣ TC Wafer Inspection ▣ Roughness & Flatness Inspection ▣ Electronical Inspection